三轴运动平台改进型交叉耦合轮廓控制

王丽梅;蔺威威

Improved crosscoupled contour control for three axis motion table

WANG Li-mei;LIN Wei-wei

Journal of Shenyang University of Technology . 2016, (4): 361 -366 . DOI: 10.7688/j.issn.1000-1646.2016.04.01