Influence of negative pulse bias on structure and properties of TiN-Cu composite films

SONG Gui-hong;ZHANG Jing-jing;YANG Xiao-ping;LI Feng;CHEN Li-jia;HE Chun-lin

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Journal of Shenyang University of Technology ›› 2014, Vol. 36 ›› Issue (3) : 275-279. DOI: 10.7688/j.issn.1000-1646.2014.03.07
材料科学与工程

Influence of negative pulse bias on structure and properties of TiN-Cu composite films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2014, 36(3): 275-279 https://doi.org/10.7688/j.issn.1000-1646.2014.03.07

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