Surface morphology of monocrystalline silicon irradiated by long pulse laser

GUO Ming;JIN Guang-yong;GAO Xun;ZHANG Wei

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Journal of Shenyang University of Technology ›› 2015, Vol. 37 ›› Issue (5) : 548-552. DOI: 10.7688/j.issn.1000-1646.2015.05.13
信息科学与工程

Surface morphology of monocrystalline silicon irradiated by long pulse laser

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2015, 37(5): 548-552 https://doi.org/10.7688/j.issn.1000-1646.2015.05.13

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