Influence of pulse bias on growth behavior of TiN film on Al alloy

SONG Guihong;ZHANG Shuo;LOU Zhuo;LI Feng;CHEN Lijia

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Journal of Shenyang University of Technology ›› 2010, Vol. 32 ›› Issue (4) : 375-379.
材料科学与工程

Influence of pulse bias on growth behavior of TiN film on Al alloy

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2010, 32(4): 375-379

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