
杠杆-复桥式3D压电微定位平台设计与分析
金俊杰, 王硕, 孙凤, 郝岩松, 徐方超, 张晓友
杠杆-复桥式3D压电微定位平台设计与分析
Design and analysis of a 3D piezoelectric micro-positioning platform of lever-compound bridge type
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