长脉冲激光辐照单晶硅的表面形态
郭明;金光勇;高勋;张巍
Surface morphology of monocrystalline silicon irradiated by long pulse laser
GUO Ming;JIN Guang-yong;GAO Xun;ZHANG Wei
Journal of Shenyang University of Technology
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2015, (5): 548
-552
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DOI: 10.7688/j.issn.1000-1646.2015.05.13