使用反应分子动力学模拟碳化硅的原子去除机理
苑泽伟,唐美玲,郎玲琪,台立刚,高兴军
Simulation of atomic removal mechanism of silicon carbide using reactive molecular dynamics
YUAN Ze-wei,TANG Mei-ling,LANG Ling-qi,TAI Li-gang,GAO Xing-jun
沈阳工业大学学报
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2021, (1): 42
-47
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DOI: 10.7688/j.issn.1000-1646.2021.01.08
