杠杆-复桥式3D压电微定位平台设计与分析
金俊杰, 王硕, 孙凤, 郝岩松, 徐方超, 张晓友
Design and analysis of a 3D piezoelectric micro-positioning platform of lever-compound bridge type
JIN Junjie, WANG Shuo, SUN Feng, HAO Yansong, XU Fangchao, ZHANG Xiaoyou
沈阳工业大学学报
.
2025, (2): 214
-222
.
DOI: 10.7688/j.issn.1000-1646.2025.02.11
