脉冲偏压对铝合金上TiN膜生长的影响

宋贵宏;张硕;娄茁;李锋;陈立佳

Influence of pulse bias on growth behavior of TiN film on Al alloy

SONG Guihong;ZHANG Shuo;LOU Zhuo;LI Feng;CHEN Lijia

Journal of Shenyang University of Technology . 2010, (4): 375 -379 .