脉冲负偏压对TiN-Cu复合膜结构与性能的影响
宋贵宏;张晶晶;杨肖平;李锋;陈立佳;贺春林
Influence of negative pulse bias on structure and properties of TiN-Cu composite films
SONG Gui-hong;ZHANG Jing-jing;YANG Xiao-ping;LI Feng;CHEN Li-jia;HE Chun-lin
Journal of Shenyang University of Technology
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2014, (3): 275
-279
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DOI: 10.7688/j.issn.1000-1646.2014.03.07
